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inLux™ SEM Raman interface
The innovative inLux™ SEM Raman interface brings high-quality Raman functionality to your scanning electron microscope (SEM) chamber. Now you can collect Raman spectra that can produce chemical images in 2D and 3D whilst simultaneously imaging in SEM. The sample remains static between SEM imaging and Raman data collection modes, so you can be confident of precise co-location when comparing Raman images and SEM images. The inLux interface offers a comprehensive range of Raman capabilities. You can collect spectra from single points, multiple points, or generate 2D and 3D confocal Raman images. The inLux interface comes fully equipped for all this work as standard, enabling you to analyse volumes larger than 0.5 mm in each axis. It features fully encoded position control, down to 50 nm, assuring precise Raman imaging.
Introducing the inLux interface

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Key benefits
- Information-rich: Raman, photoluminescence (PL) and spectral cathodoluminescence (CL) analysis is performed simultaneously and co-located with SEM imaging.
- Universal: The inLux interface can be mounted on a wide range of SEMs from different manufacturers, with different chamber sizes, and without any SEM modification.
- Non-invasive: The inLux probe can be fully retracted with a single click. This ensures that the probe does not interfere with other SEM functions or workflows when not in use.
- Determine distribution: Confocal Raman images can be produced as standard thereby enabling easy measurement of sample heterogeneity.
- Sample viewing: Large area optical imaging and montaging for visualising your sample and targeting areas of interest.
- Configurable: Up to two different excitation laser wavelengths, plus an optional CL module.
- Automated: One-click switching of laser wavelengths for Raman analysis of challenging samples.

Combined SEM-Raman analysis examples
Batteries: Electrode component distribution
SEM imaging is often used to probe the size and morphology of battery materials. In contrast to SEM analysis, Raman spectroscopy is sensitive to the structural and electronic properties of materials like carbon. Carbon is an important component in lithium-ion battery anodes.
We used the inLux interface to produce a Raman image of a battery anode. Raman spectroscopy differentiated between amorphous carbon and graphite, in addition to probing the crystalline properties of silicon particles. Raman analysis complements the high-resolution morphological SEM image and the compositional contrast observed in BSE mode.
Geology: Identifying mineral phases and fossils
Backscattered electron (BSE) imaging was used locate areas of interest on a mineral section. Next, EDS analysis was used to determine the distribution of elements corresponding to calcium, iron, zinc, sulphur, silicon and aluminium. EDS data does not reveal the crystal structure, so Raman imaging was performed using the inLux interface at the same location, without moving the sample. Raman analysis confirmed the mineral phases as structures of calcite, pyrite and anatase. The combined imaging modalities of BSE, EDS and Raman microscopy also identified an embedded calcite feature as a fossilised crinoid ossicle.
Webinar: Demonstrating the inLux Raman SEM interface
In this webinar, our scientists will demonstrate how the inLux interface simultaneously collects co-localised Raman spectra and SEM images to give precisely located chemical and structural analysis.

What is Raman spectroscopy?
Raman spectroscopy is a form of vibrational spectroscopy. It provides detailed chemical and structural characterisation, while being non-destructive and requiring no sample preparation. Raman scattering occurs when an incoming photon interacts with a vibrational mode in the material. The Raman spectroscopy technique analyses the energy change of photons to understand the vibrational and electronic properties of the material. Raman spectra are incredibly detailed and provide a chemical fingerprint that enables chemical and structural identification for a wide range of materials and mixtures. In addition, associated physical and electronic properties, such as strain can be probed using Raman analysis.

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A universal solution for in-SEM Raman analysis
SEM users are discovering the benefits of adding an inLux SEM Raman interface. We have successfully installed several inLux interfaces on various research-grade SEM chambers, worldwide. The inLux interface is used in conjunction with Renishaw's research grade Raman spectrometers and software. You can connect an inLux interface either to a Virsa™ Raman analyser or to an inVia™ confocal Raman microscope. From industrial contamination identification to academic research; the inLux interface can help you get the most from your SEM.
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Learn more about inLux interface
Find out more about the inLux interface and how it can benefit your sample analysis. Get access to our on-demand webinar demonstrating the inLux interface in action. Don’t miss out!
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Contact us to find out more
The inLux™ SEM Raman interface is designed to be compatible with SEMs that have either large or small chambers. Tell us about your SEM configuration to learn if it is compatible with an inLux interface. Fill in the form on the right and one of our experts will get in touch.






