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Choosing the best encoder for semiconductor processes - from die bonding and wafer handling to wafer inspection - requires careful matching of encoder capability against your system performance requirements.

Discover what each encoder specification means and how it impacts your application

Specification point What it means Benefits for semiconductor customers
Accuracy How close the measured position is to the actual position.
  • High accuracy position feedback assists precise wafer alignment for lithography or bonding, reducing defects and improving yield.
  • High accuracy measurement enables sub-micron positioning, which is critical in wafer steppers, pick-and-place machines, and inspection systems.
  • High accuracy position encoding enables tight process control in high-precision stages, such as those used in die bonding or metrology.
  • High accuracy encoders minimise errors in velocity calculation, which is important in constant-velocity applications such as laser scanning.
Sub-Divisional Error (SDE) The measurement error within one signal period. This is caused either by imperfections in the shape or centring of the encoder Lissajous (position signals), or inaccuracies in the subsequent sub-dividing or interpolation process.
  • Low SDE ensures smooth and predictable motion, which is vital for scanning applications such as wafer inspection processes.
  • Low SDE reduces velocity ripple, improving the performance of servo systems in high-speed semiconductor tools such as wafer dicing or lithography.
  • Low SDE enhances precision in vision-based inspection systems, leading to more reliable defect detection.
Repeatability The variation in reported position when repeatedly returning to the same actual position under identical conditions.
  • Good repeatability ensures the consistent placement of wafers and dies, which is crucial for multi-pass processes like layered lithography.
  • Good repeatability is an important consideration for minimising errors in highly tuned servo loops.
Jitter The inherent noise or uncertainty in the output signals of the encoder.
  • Low jitter is essential for high-speed scanning and precision alignment, especially in optical inspection and laser trimming.
  • Low jitter minimises noise in control loops, allowing for tighter servo tuning and faster settling times.
  • Low jitter supports stable image acquisition in vision systems, improving defect classification.
  • Using low-pass filters to reduce noise from sources such as jitter can limit speed, so encoders with low inherent noise allow for faster throughput without sacrificing accuracy.
Noise (interference) Unwanted disturbances, such as electromagnetic interference (EMI), that interfere with the signals transmitted by the encoder or directly with the encoder itself.
  • Noise can degrade signal quality, causing miscounts or servo instability. Resilience against EMI is particularly important in high-density electronic environments like plasma etching or high-speed packaging lines to avoid misalignment, defect generation, or yield loss.
  • Using encoders with higher resistance to noise ensures reliable feedback even in complex, distributed systems where encoder signals may be travelling long distances.
  • Excessive noise can cause servo system lockups, erratic behaviour, or unexpected downtime. Encoders with robust noise immunity contribute to higher equipment availability and lower maintenance costs.
Maximum speed The maximum speed at which the encoder can operate while maintaining reliable signal output.
  • High-speed capability reduces lost time between process steps, enabling faster wafer transfers, rapid scanning, and high-throughput inspection, directly impacting productivity and yield.
  • High-speed encoders support dynamic motion profiles in advanced packaging and testing equipment.
  • Lower speeds may be more appropriate where settling time and overshoot need to be minimised and small but precise movements are required, such as when positioning a wafer for inspection.
Resolution The smallest change in position that the encoder can report.
  • High resolution enables fine motion control in etching, deposition, and inspection equipment.
  • High resolution is essential for smooth velocity control in robotic arms and linear stages, minimising vibration and overshoot.
  • High resolution is critical for closed-loop feedback systems where fine adjustments are needed to maintain alignment or focus.
  • In some cases, higher-resolution encoders have lower maximum speeds, so it is important to consider the trade-off when specifying an encoder resolution.
Signal strength The amplitude and integrity of the encoder’s output signal, often measured in terms of voltage levels or signal-to-noise ratio.
  • Measuring signal strength supports optimisation of encoder installation, diagnostics and fault finding, and predictive maintenance
  • Robust signal strength allows reliable interpolation for fine resolution digital output signals.
Interpolation The process of subdividing periodic analogue signals into finer resolution digital signals.
  • Advanced interpolation enables nanometre-level resolution without requiring physically finer pitch scale and optics, reducing cost and complexity while maintaining precision.
  • Advanced interpolation supports smooth motion control in high-speed, high-precision applications like die attach, wafer inspection, and laser marking.
  • Built-in interpolation allows for compact encoder designs with high resolution, ideal for space-constrained systems like multi-axis wafer stages.
  • In digital or serial communications encoders, interpolation occurs within the encoder readhead. For analogue encoders, it may be done in an external interface or in the controller.
Analogue or digital encoders Analogue output consists of a sinusoidal voltage signal, usually 1 Vpp, and a corresponding cosine signal that is 90° out of phase.


Digital output consists of two digital square waves, 90° out of phase, which are generally generated by subdividing an analogue signal.
  • Digital encoders provide discrete signals which are generally resilient to electromagnetic interference (EMI) and provide high precision and reliability.
  • Digital encoders remove the need for external signal interpolation in an interface or in the controller.
  • Encoders with built-in digital interpolation benefit from high-quality signal processing in the analogue domain before interpolation, reducing some measurement errors such as SDE.
  • Digital encoders have a trade-off between speed, resolution and controller clock frequency. So higher resolution systems may be limited in their maximum speed when using digital signals.
  • Analogue encoders can provide high-performance position measurement at fast scanning speeds. Analogue position signals are easily processed by most control systems, enabling quick integration.
  • Low-pass filtering can be applied to analogue signals to improve the jitter performance of the encoder. However, this can impact maximum speed.
  • Analogue encoders can be susceptible to noise along the encoder cable, though this can be minimised through cable shielding.
Serial communication encoders Serial communication output is most associated with absolute encoders. Position data is transmitted upon a demand from the control system.
  • Multiple protocols are available for different control systems.
  • Serial communication can circumvent the speed-resolution trade-off.
  • Most control systems accept analogue or digital inputs, while serial communication control systems are not as widespread.

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Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

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Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.


Find out how system performance influenced the choice of encoders made by manufacturers of:

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Semiconductor packaging and assembly
Read case study >>

Precision motion stages
Read case study >>

Air bearing stages

Read case study >>

Dual wafer stages
Read case study >>

Vacuum-compatible motion platforms
Read case study >>

Rotary tables

Read case study >>

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Chip packaging and assembly solutions

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Dual wafer
stages

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Precision motion stages

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Vacuum-compatible motion platforms

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Air bearing
stages

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Rotary table
designs

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Air bearing stages

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Semiconductor packaging and assembly solutions [ASMPT]

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Dual wafer stages [U-Precision]

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Precision motion stages [ONENG]

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Vacuum-compatible motion platforms [VAD Instrument]

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Air bearing stages [TOYO]

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Rotary tables [SOLPOWER]

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Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

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Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

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Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

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Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book.

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"Lorem Ipsum is simply dummy text of the printing and typesetting industry. Lorem Ipsum has been the industry's standard dummy text ever since the 1500s, when an unknown printer took a galley of type and scrambled it to make a type specimen book."

John Doe, Manufacturing Engineering Manager, Renishaw plc

Choosing the best encoder scale pitch for your application

Achieving high throughput and process reliability requires careful consideration of the performance of an encoder system. Encoder scale pitch plays a key role in defining the performance of a motion system. There are a few key trade-offs to be aware of when choosing your encoder scale pitch. These include dirt immunity, ease of installation, and speed, alongside accuracy, Sub-Divisional Error (SDE), and jitter.

Fine pitch encoders typically have an encoder scale pitch of 20 µm or 40 µm. These scale designs, when combined with robust filtering optics and signal conditioning in the encoder readhead, offer low SDE and high-accuracy position measurement. Crucially, they offer this high performance alongside high scanning speeds, robust dirt immunity, and generous alignment tolerances for easy and quick encoder installation.

For example, the VIONiC™ optical incremental encoder series integrates Renishaw's market proven filtering optics and advanced interpolation technology to provide low SDE of < ±15 nm, excellent dirt immunity and high operating speeds.

For applications requiring absolute feedback, the RESOLUTE™ encoder offers fine resolution down to 1 nm, high-speed, and low jitter to enable high throughput with low error rates. Precision measurement can be achieved using these encoders on linear, rotary or partial arc (angle) axes.

Ultra-fine (< 4 µm) pitch encoders are associated with the highest system accuracy. However, these typically require very clean environments, due to lower dirt immunity, and have demanding tight installation tolerances. Scanning speeds may also be limited with these finer pitch scales. 

Discover the testing done by Renishaw and ACS that demonstrated how advanced servo-control algorithms can be used to achieve effective jitter equivalent to that for ultra-fine pitch products. Read application note >>

A case study: this manufacturer is benefitting from using Row 26

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High-performance linear measurement using multi-DoF encoder solutions

Conventional linear encoders measure just one degree of freedom: position along a straight line. However, other degrees of freedom, such as pitch, roll and yaw, can contribute small but undetectable errors to this linear measurement. Renishaw’s multi-DoF (multiple degrees of freedom) encoder solutions solve this problem by using multiple RESOLUTE™ absolute encoders reading one or more low-expansion glass 1.5D scales. Up to the full six degrees of freedom can be measured to detect and dynamically compensate for errors such as axis straightness and yaw. This design approach can provide the highest-performance axis measurement for dynamic applications such as XY stages.

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High-performance linear measurement using multi-DoF encoder systems

Conventional linear encoders measure just one degree of freedom: position along a straight line. However, other degrees of freedom, such as pitch, roll and yaw, can contribute small but undetectable errors to this linear measurement. Renishaw’s multi-DoF (multiple degrees of freedom) encoder systems solve this problem by using multiple RESOLUTE™ absolute encoders reading one or more low-expansion glass 1.5D scales. Up to six degrees of freedom can be measured to detect and dynamically compensate for errors such as axis straightness and yaw. This design approach can improve metrology in highly dynamic applications such as XY stages.

Discover our unique absolute multi-DoF encoder systems. Explore more >>

High-performance linear measurement using multi-DoF encoder solutions


Talk to our position measurement and motion control that best aligns with the system performance required by your application.


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