The vital role of encoders in precision motion stages
- Dual wafer stages for photolithography
- Wafer bonding and laser annealing systems
- Equipment front-end modules (EFEMs)
Position sensing with high-resolution encoders
Encoders convert the physical motion into electrical signals that can be processed and used for control purposes.
- Wire bonding
- Mask alignment
- Die placement
Closed-loop control for reliable motion feedback
This dynamic feedback loop ensures:
- Precise wafer and mask alignment
- Reduced positioning errors
- Enhanced throughput and process stability
High accuracy for critical semiconductor tasks
Renishaw encoders support precision stages in tasks such as:
- Photolithography - where overlay precision directly impacts yield
- Optics testing - which demands stable and repeatable alignment
- Nanotechnology research - requiring sub-micron control across multiple axes
➤ Why choose Renishaw’s VIONiC™ encoder for precision stages?
- Resolution down to 2.5 nm for ultra-fine motion control
- Exceptional repeatability for consistent performance
- Compact design for space-constrained semiconductor equipment
Motion profiling for controlled movement
- Smooth starts and stops, protecting delicate workpieces and tooling
- Controlled transitions between process steps, enhancing throughput and consistency
- Reduced mechanical wear and vibration, extending equipment life and minimising downtime
In semiconductor lithography and wafer handling systems, this high level of motion control ensures repeatable positioning, minimal overshoot, and stable process execution - even at high speeds.
Multi-axis synchronisation with absolute feedback
➤ Why choose Renishaw’s RESOLUTE™ encoder for precision stages?
Not sure which one suits you?
What to consider when selecting encoder systems for precision stages?
Performance
✔ Scale accuracy
✔ Scale linearity
✔ Resolution
✔ Sub-divisional error
✔ Axes lengths
✔ Scale CTE
✔ Speed
✔ Controller input frequency
✔ Cable flex life
✔ Cable flex radius
Environment
✔ Temperature
✔ Humidity
✔ Vibration
✔ IP rating
✔ Cleanliness (particle, fluid)
✔ Vacuum / exposure to X-ray radiation / lighting
✔ Electromagnetic compatibility (EMC)
Installation
✔ Size
✔ Ride height tolerance
✔ Yaw / pitch / roll
✔ Connectors
✔ Cable extension
✔ Readhead travel orientation
✔ Top or side mount
✔ Substrate type
✔ Mounting method - adhesive / track / end fixing /epoxy or screw mounted
✔ Reference datum
✔ Limits
Others
✔ Analogue / digital
✔ Interpolation clock frequency
✔ Alarm type
✔ Reference limit
✔ Protocol
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Semiconductor - the world’s No.1 manufacturer
ASM Pacific Technology Ltd (ASMPT) is the world's largest supplier of wafer assembly and packaging equipment for the semiconductor industry. ASMPT's equipment is renowned for high precision and high stability.
Consequently, it demands reliable and high quality positioning systems, including ‘dirt immunity' capability. Patented optical schemes are built into every Renishaw encoders’ readhead to withstand a variety of contaminants, such as grease, dust, particles and scratches.
The positive feedback from our customers has proven that Renishaw's encoders have excellent dirt immunity and can run reliably with little or no maintenance.
ASM Pacific Technology Ltd (Global) 
A wide variety of Renishaw encoders is employed in various ASMPT machines, including the TONiC™ incremental optical series, the RESOLUTE™ absolute optical encoders , and LM10 magnetic encoders.
Renishaw encoders are employed in various ASMPT machines:
• AB559 series wedge bonders: designed with a large aluminium bonding area of 8 inches x 4 inches and speeds to 4.1 wires/sec
• High speed MCM12 die bonders: a fully automatic multiple die, SMD, and flip chip bonding system, up to 14 types of picking tools and 12 inch wafer handling capability
• SMD and flip-chip bonders: with up to 300 mm wafer handling capacity
• UV Cured Die bonders: used in image sensor applications with resolutions to 50 nm and speeds to 3.5 m/s in operating temperatures as high as 300 ºC
Semiconductor - competitive edge in the marketplace
Beijing U-Precision Tech Co., Ltd. (U-Precision) is a leading manufacturer of equipment for high-precision industrial processes. Its advanced semiconductor equipment and motion stages use mostly TONiC™ optical encoder systems with steel tape scales.
Renishaw's TONiC™ incremental encoders have been specially designed for semiconductor applications and give OEM manufacturers, such as U-Precision, a competitive edge in the marketplace.
Optical encoders are one of the most important components of stages and process machinery, so we went through an exhaustive evaluation process before choosing Renishaw, and we continue to use their products to this day.
Beijing U-Precision Tech Co., Ltd. (China)
Precision motion platforms - cost-effective and high performance
Renishaw's TONiC™ UHV optical encoders are specially designed for use in high and ultra-high vacuum enclosures and meet the strict requirements of FPD and semiconductor process equipment.
VAD Instrument manufactures a wide range of precision motion platforms for use in a vacuum environment for semiconductor, FPD and electronics applications. The company selected TONiC™ UHV encoder and RLE fibre optic laser encoder for its latest range of vacuum compatible platforms.
Renishaw's encoder products have a good reputation in the marketplace; the TONiC™ encoder series is often seen in applications with high-performance equipment and has been widely recognized by the industry.
VAD Instrument (South Korea)
DD motors - win orders with OEM innovation
JUSTEK Inc. is a leading motion control component manufacturer in Korea. It designs and builds linear motors, direct-drive rotary (DDR) motors, motion stages and conveyors. Renishaw's family of ATOM™ miniature encoder solutions has been chosen by JUSTEK for its DD motors and motion stages.
“The miniature design of the ATOM™ readhead is ideal for our DD motors as space inside the motors is inherently limited. We tested ATOM™ repeatedly and found that it has advantages in terms of reliability, system volume and performance.” JUSTEK's product manager explained.
Renishaw is highly regarded in the metrology industry and has been involved with our products over many years.
JUSTEK Inc. (Korea)
Renishaw's ATOM™ optical encoder has a readhead measuring just 7.3 x 20.5 x 12.7 mm. It is one of only a handful of integrated miniaturised optical encoders available on the market and features leading-edge signal stability, dirt immunity and reliability.
Renishaw optical encoders adopted by JUSTEK including:
• ATOM™ miniature encoder series for DD motors and motion stages.
• TONiC™ incremental encoder series for OLED panel inspection equipment.
• RESOLUTE™ absolute encoder series for OLED panel inkjet printing equipment.
For electric vehicles (EVs)
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The true-absolute encoder with a high-speed fine-resolution position measurement system. Position is acquired immediately on start-up without requiring any motion, offering smooth velocity control and dependable positional stability. Available with linear and rotary scales with a variety of serial interfaces.
✔ High speed
✔ Excellent dirt Immunity
✔ Low SDE
✔ Low jitter
Integrates proven filtering optics and interpolation technology into a super-compact, analogue or digital incremental open optical encoder, with wide installation tolerances and built-in calibration functions.
✔ Wide installation tolerances
✔ Dirt immunity
✔ High performance
✔ Robust
The LM10 is a contactless high-speed magnetic encoder designed for linear or rotary motion sensing in harsh environments. The LM10 features a compact sealed readhead that rides at up to 1.0 mm from the self-adhesive magnetic scale or ring.
✔ Stick-on reference mark
✔ High speed operation
✔ Excellent dirt Immunity to IP68
✔ Axis lengths of up to 100 m
✔ High reliability
Speak to out manufacturing consultants
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Case Studies
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